Pure and Applied Chemistry

Pure Appl. Chem., 2010, Vol. 82, No. 6, pp. 1283-1299

http://dx.doi.org/10.1351/PAC-CON-09-09-20

Published online 2010-04-20

Modeling of the plasma chemistry and plasma–surface interactions in reactive plasmas

References

• 1. S. V. Berezhnoi, I. D. Kaganovich, L. D. Tsendin, V. A. Schweigert. Appl. Phys. Lett. 69, 2341 (1996). (http://dx.doi.org/10.1063/1.117518)
• 2. Y. T. Lee, M. A. Lieberman, A. J. Lichtenberg, F. Bose, H. Baltes, R. Patrick. J. Vac. Sci. Technol. 15, 113 (1997).
• 3. J.-P. Boeuf. Phys. Rev. A 36, 2782 (1987). (http://dx.doi.org/10.1103/PhysRevA.36.2782)
• 4. J. D. P. Passchier, W. J. Goedheer. J. Appl. Phys. 73, 1073 (1993). (http://dx.doi.org/10.1063/1.353294)
• 5. D. Loffhagen, F. Sigeneger, R. Winkler. J. Phys. D: Appl. Phys. 35, 1768 (2002). (http://dx.doi.org/10.1088/0022-3727/35/14/319)
• 6. M. J. Kushner. IEEE Trans. Plasma Sci. 14, 188 (1986). (http://dx.doi.org/10.1109/TPS.1986.4316522)
• 7. Z. Donko, K. Rozsa, R. C. Tobin. J. Phys. D: Appl. Phys. 29, 105 (1996). (http://dx.doi.org/10.1088/0022-3727/29/1/019)
• 8. M. Surendra, D. B. Graves. IEEE Trans. Plasma Sci. 19, 144 (1991). (http://dx.doi.org/10.1109/27.106808)
• 9. E. Bultinck, S. Mahieu, D. Depla, A. Bogaerts. New J. Phys. 11, 023039 (2009). (http://dx.doi.org/10.1088/1367-2630/11/2/023039)
• 10. J. Vlcek. J. Phys. D: Appl. Phys. 22, 623 (1989). (http://dx.doi.org/10.1088/0022-3727/22/5/009)
• 11. A. Bogaerts, R. Gijbels, J. Vlcek. J. Appl. Phys. 84, 121 (1998). (http://dx.doi.org/10.1063/1.368009)
• 12. M. J. Grapperhaus, M. J. Kushner. J. Appl. Phys. 81, 569 (1997). (http://dx.doi.org/10.1063/1.364199)
• 13. A. Bogaerts, R. Gijbels, W. J. Goedheer. J. Appl. Phys. 78, 2233 (1995). (http://dx.doi.org/10.1063/1.360139)
• 14. Z. Donko. Phys. Rev. E 57, 7126 (1998). (http://dx.doi.org/10.1103/PhysRevE.57.7126)
• 15. A. Bogaerts. Plasma Sources Sci. Technol. 8, 210 (1999). (http://dx.doi.org/10.1088/0963-0252/8/2/003)
• 16. J. J. Végh, D. B. Graves. Plasma Process. Polym. 6, 320 (2009). (http://dx.doi.org/10.1002/ppap.200800223)
• 17. E. Neyts, A. Bogaerts, R. Gijbels, J. Benedikt, M. C. M. van de Sanden. Diamond Relat. Mater. 13, 1873 (2004). (http://dx.doi.org/10.1016/j.diamond.2004.05.011)
• 18. C. De Bie. Paper in preparation.
• 19. <http://plasimo.phys.tue.nl>.
• 20. G. J. M. Hagelaar, L. C. Pitchford. Plasma Sources Sci. Technol. 14, 722 (2005). (http://dx.doi.org/10.1088/0963-0252/14/4/011)
• 21. E. W. McDaniel, E. A. Mason. The Mobility and Diffusion of Ions in Gases, John Wiley, New York (1973).
• 22. R. C. Reid, J. M. Prausnitz, B. E. Poling. The Properties of Gases and Liquids, 4^th ed., McGraw-Hill, New York (1987).
• 23. R. A. Svehla. Estimated Viscosities and Thermal Conductivities of Gases at High Temperatures, National Aeronautics and Space Administration, Washington, DC (1962).
• 24. G. E. Schneider, M. Zedan. Numer. Heat Transfer 4, 1 (1981). (http://dx.doi.org/10.1080/01495728108961775)
• 25. G. Hagelaar. Modeling of Microdischarges for Display Technology, Ph.D. Dissertation, Eindhoven University of Technology (2000).
• 26. Yu. B. Golubovskii, V. A. Maiorov, J. Behnke, V. G. Behnke. J. Phys. D: Appl. Phys. 36, 39 (2003). (http://dx.doi.org/10.1088/0022-3727/36/1/306)
• 27. S. Tinck, W. Boullart, A. Bogaerts. J. Phys. D: Appl. Phys. 42, 095204 (2009). (http://dx.doi.org/10.1088/0022-3727/42/9/095204)
• 28. E. Neyts, M. Tacq, A. Bogaerts. Diamond Relat. Mater. 15, 1663 (2006). (http://dx.doi.org/10.1016/j.diamond.2006.02.003)
• 29. M. Eckert, E. Neyts, A. Bogaerts. Chem. Vap. Deposition 14, 213 (2008). (http://dx.doi.org/10.1002/cvde.200706657)
• 30. C. R. A. Catlow, C. M. Freeman, R. L. Royle. Physica B&C 131, 1 (1985). (http://dx.doi.org/10.1016/0378-4363(85)90134-2)
• 31. V. Georgieva, M. Saraiva, N. Jenanathan, O. I. Lebelev, D. Depla, A. Bogaerts. J. Phys. D: Appl. Phys. 42, 065107 (2009). (http://dx.doi.org/10.1088/0022-3727/42/6/065107)
• 32. P. R. Willmott. Prog. Surf. Sci. 76, 163 (2004). (http://dx.doi.org/10.1016/j.progsurf.2004.06.001)
• 33. M. Eckert, E. Neyts, A. Bogaerts. CrystEngComm. 11, 1597 (2009). (http://dx.doi.org/10.1039/b822973m)
• 34. D. W. Brenner Phys. Rev. B 42, 9458 (1990). (http://dx.doi.org/10.1103/PhysRevB.42.9458)
• 35. Y. Shibuta, S. Maruyama. Comp. Mater. Sci. 39, 842 (2007). (http://dx.doi.org/10.1016/j.commatsci.2006.10.007)