Author detail
Articles by Zhi-Cheng Guan
- Comparative characterization of high-density plasma reactors using emission spectroscopy from VUV to NIR
Coauthors
- Guang-Yu Zhang (1 article)
- En-Ge Wang (1 article)
- Jie Ma (1 article)
- Zhi-Gang Guo (1 article)
- Zheng-De Kang (1 article)
- Yi-Kang Pu (1 article)
Affiliations
- Department of Electrical Engineering, Tsinghua University, Beijing 100084, China